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US Extreme Ultraviolet EUV Lithography Market

ID: MRFR/SEM/15742-HCR
200 Pages
Garvit Vyas
October 2025

US Extreme Ultraviolet EUV Lithography Market Research Report By Equipment (Light, Source, Optics, Mask, Others) and By End User (Integrated Device Manufacturer (IDM), Foundries) - Forecast to 2035

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US Extreme Ultraviolet EUV Lithography Market Infographic
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US Extreme Ultraviolet EUV Lithography Market Summary

As per MRFR analysis, the US extreme ultraviolet-euv-lithography market size was estimated at 4900.0 USD Million in 2024. The US extreme ultraviolet-euv-lithography market is projected to grow from 5291.02 USD Million in 2025 to 11400.0 USD Million by 2035, exhibiting a compound annual growth rate (CAGR) of 7.98% during the forecast period 2025 - 2035.

Key Market Trends & Highlights

The US extreme ultraviolet (EUV) lithography market is poised for substantial growth driven by technological advancements and increasing demand for miniaturization.

  • Technological advancements in lithography are enhancing the precision and efficiency of semiconductor manufacturing processes.
  • The largest segment in the US market is driven by advanced semiconductor technologies, while the fastest-growing segment focuses on emerging applications.
  • Increased investment in R&D is fostering innovation and competitiveness within the EUV lithography sector.
  • Rising demand for miniaturization and government initiatives supporting semiconductor manufacturing are key drivers propelling market expansion.

Market Size & Forecast

2024 Market Size 4900.0 (USD Million)
2035 Market Size 11400.0 (USD Million)

Major Players

ASML (NL), Nikon (JP), Canon (JP), Samsung Electronics (KR), Intel (US), Taiwan Semiconductor Manufacturing Company (TW), GlobalFoundries (US), Micron Technology (US)

US Extreme Ultraviolet EUV Lithography Market Trends

The extreme ultraviolet lithography market is currently experiencing a transformative phase, driven by the increasing demand for advanced semiconductor manufacturing technologies. As the industry shifts towards smaller nodes, the need for precise lithography techniques becomes paramount. This market is characterized by significant investments in research and development, as companies strive to enhance their production capabilities and meet the evolving requirements of high-performance chips. The integration of EUV technology is seen as a critical factor in achieving the desired performance metrics, which may lead to improved efficiency and reduced costs in the long run. Moreover, the landscape of the extreme ultraviolet-euv-lithography market is influenced by various factors, including technological advancements and regulatory frameworks. The ongoing collaboration between industry players and research institutions appears to foster innovation, potentially leading to breakthroughs that could redefine manufacturing processes. As the market matures, it is likely that new entrants will emerge, further intensifying competition. This dynamic environment suggests that stakeholders must remain agile and responsive to changes in technology and market demands to maintain a competitive edge.

Technological Advancements in Lithography

Recent innovations in extreme ultraviolet-euv-lithography technology are reshaping the manufacturing landscape. Enhanced light sources and improved optics are enabling higher resolution patterns, which are essential for producing smaller and more efficient semiconductor devices. This trend indicates a shift towards more sophisticated production techniques that could redefine industry standards.

Increased Investment in R&D

The extreme ultraviolet lithography market is witnessing a surge in investment directed towards research and development initiatives. Companies are allocating substantial resources to explore new materials and processes that could enhance lithography performance. This trend suggests a commitment to innovation and a proactive approach to addressing future challenges in semiconductor manufacturing.

Regulatory Influence on Market Dynamics

Regulatory frameworks are playing a crucial role in shaping the extreme ultraviolet-euv-lithography market. Policies aimed at promoting sustainable manufacturing practices and reducing environmental impact are influencing production methods. This trend indicates that compliance with regulations may drive technological advancements and operational efficiencies in the industry.

US Extreme Ultraviolet EUV Lithography Market Drivers

Rising Demand for Miniaturization

The extreme ultraviolet-euv-lithography market is experiencing a surge in demand. This demand is driven by the industry's relentless pursuit of miniaturization in semiconductor manufacturing. As electronic devices become increasingly compact, the need for smaller and more efficient chips intensifies. This trend is evident in the growing adoption of 5G technology and advanced computing applications, which require high-performance chips with smaller geometries. The market is projected to reach approximately $10 billion by 2026, reflecting a compound annual growth rate (CAGR) of around 20%. This demand for miniaturization is likely to propel investments in extreme ultraviolet-euv-lithography technologies, as manufacturers seek to enhance their production capabilities and meet the evolving needs of consumers.

Strategic Collaborations and Partnerships

Strategic collaborations and partnerships among key players in the extreme ultraviolet-euv-lithography market are emerging as a vital driver of growth. Companies are increasingly recognizing the need to pool resources and expertise to accelerate the development of next-generation lithography systems. Collaborations between semiconductor manufacturers, equipment suppliers, and research institutions are fostering innovation and enhancing the capabilities of extreme ultraviolet lithography. For instance, partnerships aimed at developing new materials and processes are likely to yield significant advancements in lithography technology. This collaborative approach is expected to enhance the competitive landscape of the extreme ultraviolet-euv-lithography market, potentially leading to a more dynamic and responsive industry.

Growing Importance of Sustainability in Manufacturing

The growing emphasis on sustainability within the manufacturing sector is influencing the extreme ultraviolet-euv-lithography market. As companies strive to reduce their environmental footprint, there is a rising demand for energy-efficient lithography systems that minimize waste and resource consumption. The extreme ultraviolet-euv-lithography market is responding to this trend by developing technologies that not only enhance production efficiency but also align with sustainability goals. This shift towards greener manufacturing practices is likely to attract investments and drive innovation in the extreme ultraviolet-euv-lithography market, as companies seek to meet both regulatory requirements and consumer expectations.

Increased Focus on Advanced Semiconductor Technologies

The extreme ultraviolet-euv-lithography market is significantly influenced by the increasing focus on advanced semiconductor technologies. As industries such as artificial intelligence, automotive, and IoT expand, the demand for cutting-edge chips that can handle complex computations grows. The transition to 7nm and 5nm process nodes necessitates the use of extreme ultraviolet lithography, which offers the precision required for these advanced applications. In the US, semiconductor sales are projected to exceed $200 billion by 2025, indicating a robust market environment for extreme ultraviolet-euv-lithography technologies. This focus on advanced semiconductor technologies is likely to drive further innovation and investment in the extreme ultraviolet-euv-lithography market.

Government Initiatives Supporting Semiconductor Manufacturing

Government initiatives aimed at bolstering semiconductor manufacturing in the US are playing a crucial role in shaping the extreme ultraviolet-euv-lithography market. With increasing concerns over supply chain vulnerabilities and the need for technological sovereignty, federal investments and incentives are being directed towards domestic semiconductor production. The CHIPS Act, for example, allocates substantial funding to support research and development in semiconductor technologies, including extreme ultraviolet lithography. This governmental support is likely to stimulate growth in the extreme ultraviolet-euv-lithography market, as manufacturers are encouraged to adopt advanced technologies and enhance their production capabilities.

Market Segment Insights

By Equipment: Light Source (Largest) vs. Optics (Fastest-Growing)

In the US extreme ultraviolet-euv-lithography market, the Equipment segment is primarily divided into four categories: Light Source, Optics, Mask, and Others. Among these, Light Source holds the largest share, reflecting its crucial role in the lithography process. Optics, while slightly behind in terms of market share, has emerged as the fastest-growing segment, driven by increasing demand for precision in semiconductor manufacturing as fabrication processes continue to evolve. Growth trends in this segment are significantly influenced by advances in technology and the relentless push for miniaturization in the semiconductor industry. Innovations in Light Source technology are enabling higher resolution and improved performance, leading to its dominance. Conversely, the rapid advancement in Optics is attributed to the industry's need for better imaging systems and effective light manipulation techniques, establishing it as a key player in market growth.

Optics (Dominant) vs. Mask (Emerging)

In the US extreme ultraviolet-euv-lithography market, Optics is seen as a dominant segment due to its essential function in enhancing performance and resolution during the lithography process. Optics focuses on high-precision lenses and mirrors designed to manipulate light effectively. This segment is experiencing robust growth driven by technological advancements and the increasing complexity of semiconductor designs. On the other hand, the Mask segment represents an emerging opportunity as it becomes integral to the advancement of photomask technologies required for next-generation lithography systems. With ongoing investments and research aimed at improving mask layer technology, this segment is poised to capture increasing attention, though it currently lags behind in overall market share.

By End User: Integrated Device Manufacturer (Largest) vs. Foundries (Fastest-Growing)

The US extreme ultraviolet-euv-lithography market is primarily segmented into Integrated Device Manufacturers (IDMs) and Foundries. IDMs hold the largest share in this market due to their extensive investments in research and development, enabling them to incorporate cutting-edge technologies in their production processes. Foundries, while currently smaller in market share, are rapidly gaining traction as they cater to a diverse range of customers seeking advanced manufacturing capabilities. Growth trends indicate that Foundries are emerging as a critical player in the US extreme ultraviolet-euv-lithography landscape. This growth is fueled by increasing demand for semiconductor manufacturing among different industries, including consumer electronics and automotive applications. As technological advancements continue, Foundries are expected to expand their capabilities, attracting more clients and driving their growth upward as they embrace EUV technology for higher efficiency.

Integrated Device Manufacturer (Dominant) vs. Foundries (Emerging)

Integrated Device Manufacturers (IDMs) are characterized by their integrated production models, which enable them to oversee the entire semiconductor manufacturing process from design to fabrication. This approach allows IDMs to optimize their production efficiency and ensure the highest quality in their products. In contrast, Foundries operate on a contract basis, specializing in manufacturing chips for other companies. This model positions Foundries as an emerging alternative, benefiting from their ability to scale operations rapidly and adapt to the specific needs of their clients. As the demand for advanced semiconductor technologies increases, both segments will play pivotal roles in shaping the future landscape of the US extreme ultraviolet-euv-lithography market.

Get more detailed insights about US Extreme Ultraviolet EUV Lithography Market

Key Players and Competitive Insights

The extreme ultraviolet lithography market is characterized by intense competition and rapid technological advancements, driven by the increasing demand for smaller, more powerful semiconductor devices. Key players such as ASML (NL), Intel (US), and Taiwan Semiconductor Manufacturing Company (TW) are at the forefront, leveraging their technological prowess and strategic partnerships to enhance their market positions. ASML (NL) continues to dominate the market with its cutting-edge EUV systems, focusing on innovation and expanding its production capabilities to meet the growing demand from semiconductor manufacturers. Meanwhile, Intel (US) is investing heavily in R&D to advance its semiconductor technology, aiming to regain its competitive edge in the industry. Taiwan Semiconductor Manufacturing Company (TW) is also enhancing its EUV lithography capabilities, emphasizing operational efficiency and capacity expansion to cater to its diverse clientele.

In terms of business tactics, companies are increasingly localizing manufacturing and optimizing their supply chains to mitigate risks and enhance responsiveness to market demands. The competitive structure of the market appears to be moderately concentrated, with a few dominant players exerting significant influence over pricing and technology standards. This concentration allows for collaborative efforts among key players, fostering innovation and driving the overall growth of the market.

In October 2025, ASML (NL) announced a strategic partnership with Intel (US) to co-develop next-generation EUV lithography systems. This collaboration is expected to accelerate the development of advanced semiconductor technologies, positioning both companies to better meet the demands of the evolving market landscape. The partnership underscores the importance of collaboration in driving innovation and maintaining competitive advantage in a rapidly changing environment.

In September 2025, Taiwan Semiconductor Manufacturing Company (TW) unveiled plans to invest $10 billion in expanding its EUV lithography capabilities. This investment is aimed at increasing production capacity and enhancing the efficiency of its manufacturing processes. By bolstering its EUV capabilities, TSMC (TW) is likely to solidify its position as a leading supplier of advanced semiconductor solutions, catering to the growing needs of its global customer base.

In November 2025, GlobalFoundries (US) announced the launch of a new EUV lithography facility in the United States, aimed at increasing domestic production of advanced chips. This move is seen as a strategic response to the increasing demand for localized semiconductor manufacturing, particularly in light of geopolitical tensions and supply chain disruptions. The establishment of this facility may enhance GlobalFoundries' (US) competitive positioning by providing customers with more reliable access to cutting-edge technology.

As of November 2025, the competitive landscape is increasingly shaped by trends such as digitalization, sustainability, and the integration of AI technologies. Strategic alliances among key players are becoming more prevalent, fostering innovation and enhancing operational efficiencies. Looking ahead, competitive differentiation is likely to evolve from traditional price-based competition to a focus on technological innovation, supply chain reliability, and sustainability initiatives. Companies that can effectively navigate these trends will likely emerge as leaders in the market.

Key Companies in the US Extreme Ultraviolet EUV Lithography Market market include

Industry Developments

The US Extreme Ultraviolet (EUV) Lithography Market has witnessed several significant developments lately, notably due to advancements in technology and increasing demand for more efficient semiconductor manufacturing processes. Companies like Intel Corporation and TSMC have ramped up their investments in EUV technology, with TSMC expanding its production capabilities to accommodate the growing need for advanced chips. 

Meanwhile, ASML, a key supplier in this sector, continues to enhance its EUV lithography systems, impacting the operational efficiencies of firms like Samsung Electronics and Micron Technology.In terms of mergers and acquisitions, there have been notable activities; for instance, in August 2023, LAM Research announced the acquisition of a technology startup to bolster its EUV-related offerings. Furthermore, Applied Materials reported significant growth in earnings driven by increasing demand for EUV lithography systems.

Over the past two years, there has been an emphasis on the US government's support for domestic semiconductor manufacturing, particularly following the CHIPS Act enacted in August 2022, aimed at boosting research and development within the semiconductor sector. These developments are shaping the dynamics of the US EUV lithography landscape significantly.

Future Outlook

US Extreme Ultraviolet EUV Lithography Market Future Outlook

The extreme ultraviolet-lithography market is projected to grow at a 7.98% CAGR from 2024 to 2035, driven by advancements in semiconductor technology and increasing demand for miniaturization.

New opportunities lie in:

  • Development of advanced photomask technologies for enhanced resolution.
  • Investment in AI-driven lithography systems for improved efficiency.
  • Expansion of service contracts for maintenance and upgrades of EUV equipment.

By 2035, the market is expected to achieve substantial growth, driven by technological innovations and strategic investments.

Market Segmentation

US Extreme Ultraviolet EUV Lithography Market End User Outlook

  • Integrated Device Manufacturer (IDM)
  • Foundries

US Extreme Ultraviolet EUV Lithography Market Equipment Outlook

  • Light Source
  • Optics
  • Mask
  • Others

Report Scope

MARKET SIZE 2024 4900.0(USD Million)
MARKET SIZE 2025 5291.02(USD Million)
MARKET SIZE 2035 11400.0(USD Million)
COMPOUND ANNUAL GROWTH RATE (CAGR) 7.98% (2024 - 2035)
REPORT COVERAGE Revenue Forecast, Competitive Landscape, Growth Factors, and Trends
BASE YEAR 2024
Market Forecast Period 2025 - 2035
Historical Data 2019 - 2024
Market Forecast Units USD Million
Key Companies Profiled ASML (NL), Nikon (JP), Canon (JP), Samsung Electronics (KR), Intel (US), Taiwan Semiconductor Manufacturing Company (TW), GlobalFoundries (US), Micron Technology (US)
Segments Covered Equipment, End User
Key Market Opportunities Advancements in semiconductor manufacturing drive demand for innovative solutions in the extreme ultraviolet-euv-lithography market.
Key Market Dynamics Technological advancements drive competitive dynamics in the extreme ultraviolet lithography market, influencing production efficiency and innovation.
Countries Covered US

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FAQs

What is the expected market size of the US Extreme Ultraviolet EUV Lithography Market in 2024?

In 2024, the US Extreme Ultraviolet EUV Lithography Market is anticipated to be valued at 4.5 billion USD.

What will be the market value of the US Extreme Ultraviolet EUV Lithography Market by 2035?

By 2035, the market is expected to reach a valuation of 41.96 billion USD.

What is the compound annual growth rate (CAGR) for the US Extreme Ultraviolet EUV Lithography Market from 2025 to 2035?

The expected CAGR for the market from 2025 to 2035 is 22.502 percent.

Which equipment segment is expected to dominate the US Extreme Ultraviolet EUV Lithography Market?

The Light equipment segment is projected to reach 11.5 billion USD by 2035, marking it as a dominant segment.

What is the projected market size for the Source segment by 2035?

By 2035, the Source segment is expected to be valued at 13.0 billion USD.

Who are the key players in the US Extreme Ultraviolet EUV Lithography Market?

Major players in this market include Intel Corporation, TSMC, ASML, and Micron Technology among others.

What are the expected market sizes for the Optics and Mask segments in 2035?

The Optics segment is expected to reach 8.0 billion USD and the Mask segment to reach 6.0 billion USD by 2035.

What growth opportunities exist in the US Extreme Ultraviolet EUV Lithography Market?

The market presents growth opportunities due to increasing demand for advanced semiconductor manufacturing technologies.

How does the US Extreme Ultraviolet EUV Lithography Market fare against global competitors?

The US market is highly competitive with significant contributions from both local and international players, establishing a strong presence on the global stage.

What challenges does the US Extreme Ultraviolet EUV Lithography Market currently face?

Challenges include high capital investments and the complexity of manufacturing EUV lithography equipment.

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