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Plasma Etching Equipment Market

ID: MRFR/SEM/16232-HCR
128 Pages
Aarti Dhapte
October 2025

Plasma Etching Equipment Market Research Report Information By Application (Logic and Memory, Power Device, MEMS (Micro-Electro-Mechanical System), RFID (Radio Frequency Identification), and CMOS Image Sensors), By Technology (Reactive Ion Etching (RIE), Inductively Coupled Plasma Etching, and Deep Reactive Ion Etching), By Type (Barrel Type Plasma Etching Equipment and Planar Type Plasma Etching Equipment), By Industry Vertical (Consumer Electronics, Industrial, Automotive, Healthcare, and Others), And By Region (North America, Europe, Asia... read more

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Plasma Etching Equipment Market Summary

As per MRFR analysis, the Plasma Etching Equipment Market Size was estimated at 12.57 USD Billion in 2024. The Plasma Etching Equipment industry is projected to grow from 13.48 USD Billion in 2025 to 27.07 USD Billion by 2035, exhibiting a compound annual growth rate (CAGR) of 7.22 during the forecast period 2025 - 2035.

Key Market Trends & Highlights

The Plasma Etching Equipment Market is poised for substantial growth driven by technological advancements and increasing demand across various sectors.

  • North America remains the largest market for plasma etching equipment, driven by its robust semiconductor manufacturing sector.
  • Asia-Pacific is emerging as the fastest-growing region, fueled by rapid advancements in electronics and technology.
  • The Logic and Memory segments dominate the market, while the Power Device segment is witnessing the fastest growth due to evolving industry needs.
  • Key market drivers include rising demand in semiconductor manufacturing and increased investment in research and development.

Market Size & Forecast

2024 Market Size 12.57 (USD Billion)
2035 Market Size 27.07 (USD Billion)
CAGR (2025 - 2035) 7.22%

Major Players

Applied Materials (US), Lam Research (US), Tokyo Electron (JP), ASML (NL), KLA Corporation (US), Hitachi High-Technologies (JP), Nikon Corporation (JP), Oxford Instruments (GB), Plasma-Therm (US)

Plasma Etching Equipment Market Trends

The Plasma Etching Equipment Market is currently experiencing a dynamic evolution, driven by advancements in semiconductor manufacturing and the increasing demand for miniaturization in electronic devices. As industries strive for higher precision and efficiency, the adoption of plasma etching technologies is becoming more prevalent. This trend is particularly evident in sectors such as telecommunications, automotive, and consumer electronics, where the need for intricate designs and high-performance components is paramount. Furthermore, the integration of automation and smart technologies into plasma etching systems is enhancing operational capabilities, thereby attracting a broader range of applications. In addition to technological advancements, environmental considerations are shaping the Plasma Etching Equipment Market. Manufacturers are increasingly focusing on developing eco-friendly etching solutions that minimize waste and reduce harmful emissions. This shift not only aligns with global sustainability goals but also meets the regulatory requirements imposed by various governments. As a result, companies are investing in research and development to create innovative products that cater to both performance and environmental standards. Overall, the Plasma Etching Equipment Market appears poised for growth, with a strong emphasis on technological innovation and sustainability driving its trajectory.

Technological Advancements

The Plasma Etching Equipment Market is witnessing rapid technological advancements that enhance etching precision and efficiency. Innovations in equipment design and process optimization are enabling manufacturers to achieve finer resolutions and faster processing times. This trend is particularly relevant in the semiconductor industry, where the demand for smaller and more complex components continues to rise.

Sustainability Initiatives

Environmental sustainability is becoming a focal point within the Plasma Etching Equipment Market. Companies are increasingly prioritizing the development of eco-friendly etching solutions that reduce waste and emissions. This shift not only addresses regulatory pressures but also aligns with the growing consumer demand for environmentally responsible manufacturing practices.

Market Diversification

The Plasma Etching Equipment Market is diversifying as new applications emerge across various industries. Beyond traditional semiconductor manufacturing, sectors such as medical devices and renewable energy are beginning to adopt plasma etching technologies. This diversification indicates a broader acceptance of plasma etching solutions, potentially leading to new growth opportunities.

Plasma Etching Equipment Market Drivers

Advancements in Material Science

The Plasma Etching Equipment Market is benefiting from advancements in material science, which are driving innovation in etching technologies. The development of new materials, such as 2D materials and advanced polymers, necessitates the use of precise etching techniques to achieve desired properties and functionalities. In 2025, the materials market is projected to experience substantial growth, with an increasing emphasis on nanotechnology and advanced composites. Plasma etching plays a critical role in the fabrication of these materials, enabling researchers and manufacturers to explore new applications and enhance product performance. As the demand for innovative materials continues to rise, the plasma etching equipment market is likely to expand, reflecting the ongoing evolution in material science.

Expansion of the Electronics Sector

The Plasma Etching Equipment Market is significantly influenced by the expansion of the electronics sector. With the proliferation of consumer electronics, including smartphones, tablets, and wearables, the demand for advanced manufacturing processes has intensified. In 2025, the electronics market is anticipated to surpass 1 trillion USD, creating a robust environment for plasma etching equipment. This equipment plays a crucial role in the fabrication of electronic components, enabling manufacturers to achieve higher precision and efficiency. As companies strive to enhance product performance and reduce production costs, the adoption of plasma etching technology is likely to increase. Furthermore, the integration of smart technologies and the Internet of Things (IoT) into everyday devices is expected to further drive the need for advanced etching solutions, thereby bolstering the market.

Growth in Renewable Energy Technologies

The Plasma Etching Equipment Market is poised for growth due to the increasing focus on renewable energy technologies. As the world shifts towards sustainable energy solutions, the demand for solar cells and other renewable energy components is on the rise. In 2025, the solar energy market is projected to reach approximately 200 billion USD, which will likely stimulate the need for advanced manufacturing processes, including plasma etching. This technology is essential for the production of photovoltaic cells, where precision etching is required to enhance efficiency and energy conversion rates. As manufacturers seek to optimize production and reduce costs, the adoption of plasma etching equipment is expected to grow, aligning with the global push for cleaner energy solutions.

Rising Demand in Semiconductor Manufacturing

The Plasma Etching Equipment Market is experiencing a surge in demand, primarily driven by the semiconductor manufacturing sector. As the industry continues to evolve, the need for precision and miniaturization in electronic components has become paramount. In 2025, the semiconductor market is projected to reach a valuation of approximately 600 billion USD, which directly correlates with the increased utilization of plasma etching equipment. This technology is essential for creating intricate patterns on silicon wafers, thereby enhancing the performance and efficiency of semiconductor devices. The ongoing advancements in chip technology, including the transition to smaller nodes, further necessitate the adoption of sophisticated plasma etching solutions. Consequently, manufacturers are investing heavily in innovative etching technologies to meet the growing requirements of the semiconductor industry.

Increased Investment in Research and Development

The Plasma Etching Equipment Market is witnessing increased investment in research and development (R&D) activities. As industries strive to innovate and improve manufacturing processes, companies are allocating significant resources to R&D initiatives. In 2025, the global R&D expenditure is expected to reach over 2 trillion USD, with a substantial portion directed towards advanced manufacturing technologies, including plasma etching. This investment is likely to foster the development of next-generation etching equipment that offers enhanced capabilities and efficiency. Furthermore, collaboration between academic institutions and industry players is expected to accelerate technological advancements, thereby driving the plasma etching equipment market forward. As new applications and technologies emerge, the market is poised for sustained growth.

Market Segment Insights

By Application: Logic and Memory (Largest) vs. Power Device (Fastest-Growing)

In the Plasma Etching Equipment Market, the application segment is primarily dominated by Logic and Memory devices, which hold a significant market share due to their integral role in semiconductor fabrication. This segment benefits from the increasing demand for high-performance computing and connectivity solutions. Power Device applications are also gaining traction as they play a crucial role in energy-efficient solutions and renewable energy technologies, driving their growing share within the market.

Power Device (Dominant) vs. MEMS (Emerging)

The Power Device segment is characterized by its essential function in high-voltage and high-frequency applications, making it a dominant player in the Plasma Etching Equipment Market. This segment is primarily driven by the rise in electric vehicle production, renewable energy sources, and advancements in power management technologies. Conversely, MEMS (Micro-Electro-Mechanical Systems) are emerging as a significant application due to their versatility and application in consumer electronics, automotive, and medical devices. MEMS benefit from miniaturization and integration trends, which enhance device performance and open new market opportunities.

By Technology: Reactive Ion Etching (Largest) vs. Deep Reactive Ion Etching (Fastest-Growing)

The market for Plasma Etching Equipment Market is seeing varied distribution across its core technologies. Reactive Ion Etching (RIE) has established itself as the dominant technology due to its versatility and adaptability in various semiconductor manufacturing processes. In contrast, Inductively Coupled Plasma Etching is gaining traction, but it faces competition from the emerging trend of Deep Reactive Ion Etching, which is increasingly favored for its efficiency in etching high aspect ratio structures. The growth trends within this segment highlight a shift towards more advanced etching techniques. Deep Reactive Ion Etching is rapidly becoming the fastest-growing technology due to the increasing demand for miniaturization in electronic components, coupled with its ability to achieve higher precision. The industry is also driven by technological advancements, as manufacturers seek improved yield and performance in their production lines. Both growth in semiconductor applications and the rise of IoT devices further fuel these trends.

Technology: RIE (Dominant) vs. DRIE (Emerging)

Reactive Ion Etching (RIE) remains the dominant technology in the Plasma Etching Equipment Market, recognized for its effectiveness in etching a variety of materials while maintaining high resolution. It plays a crucial role in the fabrication of integrated circuits, making it indispensable for semiconductor manufacturers. In contrast, Deep Reactive Ion Etching (DRIE) is an emerging technology, specifically designed to create deep features in silicon and other substrates. DRIE is known for its superior aspect ratio capabilities, allowing for intricate designs essential in MEMS (Micro-Electro-Mechanical Systems) and advanced semiconductor applications. As the demand for microfabrication techniques intensifies, DRIE's ability to produce complex structures positions it well for substantial growth, particularly in sectors requiring precision engineering.

By Type: Planar Type (Largest) vs. Barrel Type (Fastest-Growing)

In the Plasma Etching Equipment Market, the distribution of market share between the Barrel Type and Planar Type segments signifies a competitive landscape. Planar Type Plasma Etching Equipment Market currently commands the largest portion of the market share, attributed to its widespread adoption in semiconductor manufacturing processes. In contrast, Barrel Type Plasma Etching Equipment Market, while smaller in market share, is witnessing a surge in demand due to its efficiency in processing wafers with high aspect ratios, making it a vital player in niche applications. As market trends evolve, growth drivers for the Barrel and Planar Type segments reflect the advancing needs of the semiconductor industry. The increasing complexity of electronic devices propels the demand for advanced etching technologies, fostering innovation within both types of equipment. Furthermore, the rise in manufacturing processes related to IoT devices and automotive electronics is anticipated to accelerate the uptake of Barrel Type, viewing it as an emerging choice for high-tech applications, while Planar Type continues to dominate with its established reputation and reliability.

Etching Equipment: Planar Type (Dominant) vs. Barrel Type (Emerging)

The Planar Type Plasma Etching Equipment Market is recognized for its robust performance in the semiconductor industry, particularly for its ability to deliver precision etching on a wider array of substrates. This dominance is largely due to its efficacy in high-volume manufacturing environments, where uniformity and repeatability are paramount. On the other hand, Barrel Type Plasma Etching Equipment Market is perceived as an emerging solution, mainly due to its ability to etch features on 3D structures with better coverage. This segment finds itself increasingly appealing for advanced applications that require innovative solutions for aspect ratio challenges, thereby positioning Barrel Type as a flexible and essential tool in the evolving landscape of semiconductor fabrication.

By Industry Vertical: Consumer Electronics (Largest) vs. Healthcare (Fastest-Growing)

The Plasma Etching Equipment Market is significantly influenced by various industry verticals, with Consumer Electronics currently holding the most substantial market share. This segment's dominance is driven by the increasing demand for advanced electronic devices, necessitating precise etching technology to enhance product performance. Following closely are Industrial and Automotive sectors, which, while showing steady growth, do not match the scale of consumer electronics in market share. On the other hand, the Healthcare sector is emerging as the fastest-growing segment within the Plasma Etching Equipment Market. This growth is propelled by the rising adoption of plasma technology in manufacturing medical devices and equipment, which requires stringent precision and quality standards. The continuous advancements in healthcare technology further amplify the need for efficient etching processes, signaling a robust expansion of this segment moving forward.

Consumer Electronics: Dominant vs. Healthcare: Emerging

The Consumer Electronics sector is characterized by its need for continuous innovation and miniaturization of electronic components, driving the demand for precise plasma etching techniques. This industry has seen a consistent increase in investment and technological advancements to meet consumer expectations for high-performance devices, leading to a strong market presence. In contrast, the Healthcare sector is witnessing rapid growth as advancements in medical technology and demand for sophisticated medical devices rise. This segment benefits from increased regulatory emphasis on quality and precision in manufacturing, fostering an environment ripe for investment in plasma etching technologies, which are crucial for producing high-quality medical equipment.

Get more detailed insights about Plasma Etching Equipment Market

Regional Insights

North America : Innovation and Market Leadership

North America is the largest market for plasma etching equipment, holding approximately 45% of the global market share. The region's growth is driven by advancements in semiconductor manufacturing, increasing demand for miniaturized electronic devices, and supportive government regulations promoting technological innovation. The presence of major players like Applied Materials and Lam Research further fuels market expansion, alongside investments in R&D and infrastructure. The United States leads the North American market, followed by Canada, which is emerging as a significant player in the semiconductor sector. The competitive landscape is characterized by a mix of established companies and innovative startups, all vying for market share. Key players such as KLA Corporation and Oxford Instruments are actively involved in enhancing their product offerings, ensuring that North America remains at the forefront of plasma etching technology.

Europe : Emerging Technologies and Growth

Europe is witnessing significant growth in the plasma etching equipment market, accounting for approximately 30% of the global share. The region's expansion is driven by increasing investments in semiconductor manufacturing and a strong focus on research and development. Regulatory frameworks supporting sustainable manufacturing practices are also catalyzing market growth, as companies seek to comply with stringent environmental standards. Germany and France are the leading countries in this market, with a robust presence of key players like ASML and Oxford Instruments. The competitive landscape is marked by collaborations between technology firms and research institutions, fostering innovation. The European market is characterized by a strong emphasis on quality and precision, ensuring that manufacturers meet the high standards required in advanced semiconductor applications.

Asia-Pacific : Rapid Growth and Innovation

Asia-Pacific is the second-largest market for plasma etching equipment, holding around 25% of the global market share. The region's growth is primarily driven by the booming electronics industry, particularly in countries like China, Japan, and South Korea. The increasing demand for consumer electronics and advancements in semiconductor technology are key factors propelling market expansion. Additionally, government initiatives aimed at boosting local manufacturing capabilities are further enhancing market dynamics. China is the largest market within Asia-Pacific, followed by Japan, which is home to several leading manufacturers. The competitive landscape is vibrant, with companies like Tokyo Electron and Hitachi High-Technologies leading the charge. The presence of numerous startups and established firms fosters a highly competitive environment, driving innovation and technological advancements in plasma etching equipment.

Middle East and Africa : Emerging Market Potential

The Middle East and Africa (MEA) region is gradually emerging in the plasma etching equipment market, currently holding about 5% of the global share. The growth in this region is driven by increasing investments in technology and infrastructure, particularly in countries like the United Arab Emirates and South Africa. The demand for advanced manufacturing technologies is rising, supported by government initiatives aimed at diversifying economies and enhancing local production capabilities. The competitive landscape in MEA is still developing, with a few key players beginning to establish a foothold. Companies are increasingly focusing on partnerships and collaborations to enhance their market presence. As the region continues to invest in technology and innovation, the potential for growth in the plasma etching equipment market is significant, paving the way for future advancements and opportunities.

Plasma Etching Equipment Market Regional Image

Key Players and Competitive Insights

The Plasma Etching Equipment Market is characterized by a dynamic competitive landscape, driven by technological advancements and increasing demand for miniaturization in semiconductor manufacturing. Key players such as Applied Materials (US), Lam Research (US), and Tokyo Electron (JP) are at the forefront, each adopting distinct strategies to enhance their market positioning. Applied Materials (US) focuses on innovation, particularly in developing advanced etching technologies that cater to the evolving needs of semiconductor fabrication. Lam Research (US) emphasizes strategic partnerships and collaborations to bolster its product offerings, while Tokyo Electron (JP) is investing heavily in regional expansion to tap into emerging markets, thereby shaping a competitive environment that is both collaborative and competitive.

In terms of business tactics, companies are increasingly localizing manufacturing to reduce lead times and optimize supply chains. The market structure appears moderately fragmented, with several key players exerting significant influence. This fragmentation allows for a variety of competitive strategies, as companies seek to differentiate themselves through technological advancements and customer-centric solutions.

In August 2025, Applied Materials (US) announced a groundbreaking development in plasma etching technology, unveiling a new system designed to enhance precision and efficiency in semiconductor manufacturing. This innovation is expected to solidify its leadership position in the market, as it addresses the growing demand for high-performance etching solutions. Similarly, in September 2025, Lam Research (US) entered into a strategic partnership with a leading AI technology firm to integrate artificial intelligence into its etching processes. This collaboration is likely to enhance operational efficiencies and reduce downtime, positioning Lam Research as a pioneer in AI-driven manufacturing solutions.

Moreover, in July 2025, Tokyo Electron (JP) expanded its manufacturing capabilities in Southeast Asia, aiming to cater to the increasing demand from local semiconductor manufacturers. This strategic move not only enhances its production capacity but also strengthens its foothold in a rapidly growing market, indicating a proactive approach to regional demand fluctuations.

As of October 2025, the competitive trends in the Plasma Etching Equipment Market are increasingly defined by digitalization, sustainability, and the integration of AI technologies. Strategic alliances are becoming more prevalent, as companies recognize the need for collaborative innovation to stay ahead. Looking forward, it is anticipated that competitive differentiation will evolve, shifting from traditional price-based competition to a focus on innovation, technological advancements, and supply chain reliability. This transition underscores the importance of agility and responsiveness in a market that is continuously evolving.

Key Companies in the Plasma Etching Equipment Market market include

Industry Developments

March 2022: Manufacturer of equipment for etching, deposition, and surface treatment processing Samco unveiled the new "Cluster H" plasma etching cluster tool. Utilizing its state-of-the-art plasma technique, Cluster H offers full-scale manufacturing capabilities for compound semiconductor devices, including high-frequency filters, CMOS image sensors, GaAs VCSELs, micro-OLED/LED, SiC/GaN power devices, and sophisticated packaging.

February 2022: Deep silicon etch technology will be used by chipmakers to create next-generation power management integrated circuits and power devices. Lam Research Corporation, a manufacturer of plasma etch and deposition technologies, unveiled the Syndion GP, a new product.

December 2021: A plasma etch system called Impressio 2400 PICP Pro was introduced by Tokyo Electron to process glass substrates of the eighth generation. It has a new PICP Pro chamber designed for high-resolution procedures.

Future Outlook

Plasma Etching Equipment Market Future Outlook

The Plasma Etching Equipment Market is projected to grow at a 7.22% CAGR from 2024 to 2035, driven by advancements in semiconductor manufacturing and increased demand for miniaturization.

New opportunities lie in:

  • Development of eco-friendly etching gases for sustainable operations.
  • Integration of AI for predictive maintenance in etching systems.
  • Expansion into emerging markets with tailored plasma solutions.

By 2035, the market is expected to achieve robust growth, positioning itself as a leader in advanced manufacturing technologies.

Market Segmentation

Plasma Etching Equipment Market Type Outlook

  • Barrel Type Plasma Etching Equipment
  • Planar Type Plasma Etching Equipment

Plasma Etching Equipment Market Technology Outlook

  • Reactive Ion Etching (RIE)
  • Inductively Coupled Plasma Etching
  • Deep Reactive Ion Etching

Plasma Etching Equipment Market Application Outlook

  • Logic and Memory
  • Power Device
  • MEMS (Micro-Electro-Mechanical System)
  • RFID (Radio Frequency Identification)
  • CMOS Image Sensors

Plasma Etching Equipment Market Industry Vertical Outlook

  • Consumer Electronics
  • Industrial
  • Automotive
  • Healthcare
  • Others

Report Scope

MARKET SIZE 202412.57(USD Billion)
MARKET SIZE 202513.48(USD Billion)
MARKET SIZE 203527.07(USD Billion)
COMPOUND ANNUAL GROWTH RATE (CAGR)7.22% (2024 - 2035)
REPORT COVERAGERevenue Forecast, Competitive Landscape, Growth Factors, and Trends
BASE YEAR2024
Market Forecast Period2025 - 2035
Historical Data2019 - 2024
Market Forecast UnitsUSD Billion
Key Companies ProfiledMarket analysis in progress
Segments CoveredMarket segmentation analysis in progress
Key Market OpportunitiesAdvancements in semiconductor manufacturing drive demand for innovative Plasma Etching Equipment solutions.
Key Market DynamicsTechnological advancements drive demand for plasma etching equipment, enhancing precision in semiconductor manufacturing processes.
Countries CoveredNorth America, Europe, APAC, South America, MEA

Market Highlights

Author
Aarti Dhapte
Team Lead - Research

She holds an experience of about 6+ years in Market Research and Business Consulting, working under the spectrum of Information Communication Technology, Telecommunications and Semiconductor domains. Aarti conceptualizes and implements a scalable business strategy and provides strategic leadership to the clients. Her expertise lies in market estimation, competitive intelligence, pipeline analysis, customer assessment, etc.

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FAQs

What is the projected market valuation of the Plasma Etching Equipment Market by 2035?

The Plasma Etching Equipment Market is projected to reach a valuation of 27.07 USD Billion by 2035.

What was the market valuation of the Plasma Etching Equipment Market in 2024?

In 2024, the market valuation of the Plasma Etching Equipment Market was 12.57 USD Billion.

What is the expected CAGR for the Plasma Etching Equipment Market during the forecast period 2025 - 2035?

The expected CAGR for the Plasma Etching Equipment Market during the forecast period 2025 - 2035 is 7.22%.

Which companies are considered key players in the Plasma Etching Equipment Market?

Key players in the Plasma Etching Equipment Market include Applied Materials, Lam Research, Tokyo Electron, and ASML.

What are the main application segments of the Plasma Etching Equipment Market?

The main application segments include Logic and Memory, Power Device, MEMS, RFID, and CMOS Image Sensors.

How does the market for Reactive Ion Etching (RIE) compare to other technologies in 2025?

In 2025, the market for Reactive Ion Etching (RIE) is expected to be valued at approximately 9.8 USD Billion, indicating strong demand.

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